검색결과 : 1건
No. | Article |
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1 |
Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators Loebl HP, Klee M, Metzmacher C, Brand W, Milsom R, Lok P Materials Chemistry and Physics, 79(2-3), 143, 2003 |
No. | Article |
---|---|
1 |
Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators Loebl HP, Klee M, Metzmacher C, Brand W, Milsom R, Lok P Materials Chemistry and Physics, 79(2-3), 143, 2003 |