검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Experimental study of the effect of pressure and gas density on the transition from stratified to slug flow in a horizontal pipe Loh WL, Hernandez-Perez V, Tam ND, Wan TT, Zhao YQ, Premanadhan VK International Journal of Multiphase Flow, 85, 196, 2016 |
| 2 |
Effect of halogen in high-density oxygen plasmas on photoresist trimming Sin CY, Chen BH, Loh WL, Yu J, Yelehanka P, See A, Chan L AIChE Journal, 50(7), 1578, 2004 |
| 3 |
Photoresist trimming in oxygen-based high-density plasmas: Effect of HBr and Cl-2 addition to CF4/O-2 mixtures Sin CY, Chen BH, Loh WL, Yu J, Yelehanka P, See A, Chan L Industrial & Engineering Chemistry Research, 42(24), 6080, 2003 |
| 4 |
Resist trimming in high-density CF4/O-2 plasmas for sub-0.1 mu m device fabrication Sin CY, Chen BH, Loh WL, Yu J, Yelehanka P, See A, Chan L Journal of Vacuum Science & Technology B, 20(5), 1974, 2002 |
| 5 |
Preparation of highly dispersed molybdenum on alumina by thermal decomposition of Mo(CO)(6) Jaenicke S, Loh WL Catalysis Today, 49(1-3), 123, 1999 |