검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evolution of fluorine and boron profiles during annealing in crystalline Si Lopeza P, Pelaz L, Duffy R, Meunier-Beillard P, Roozeboom F, van der Tak K, Breimer P, van Berkum JGM, Verheijen MA, Kaiser M Journal of Vacuum Science & Technology B, 26(1), 377, 2008 |