검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Improved deposition rates for mu c-Si : H at low substrate temperature Klein S, Finger F, Carius R, Lossen J Thin Solid Films, 501(1-2), 43, 2006 |
| 2 |
Optimization of the filament arrangement at constant radiant heat in HW-CVD for the preparation of compact mu c-Si : H at high deposition rates Lossen J, Klein S, Finger F Thin Solid Films, 451-52, 531, 2004 |