검색결과 : 1건
No. | Article |
---|---|
1 |
In-Situ Mass-Spectral and Ir Studies of the Role of Auxiliary Reagents in the Enhancement of Copper Growth in the Chemical-Vapor-Deposition of Cu(II) Beta-Diketonate Precursors Kaloyeros AE, Zheng B, Lou IS, Lau J, Hellgeth JW Thin Solid Films, 262(1-2), 20, 1995 |