검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ultrahigh-resolution pattern using electron-beam lithography HF wet etching Tiron R, Mollard L, Louveau O, Lajoinie E Journal of Vacuum Science & Technology B, 25(4), 1147, 2007 |
| 2 |
Mechanisms of porous dielectric film modification induced by reducing and oxidizing ash plasmas Posseme N, Chevolleau T, David T, Darnon M, Louveau O, Joubert O Journal of Vacuum Science & Technology B, 25(6), 1928, 2007 |