검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of slurry components on chemical mechanical polishing of copper at low down pressure and a chemical kinetics model Liu XY, Liu YL, Liang Y, Liu HX, Zhao ZW, Gao BH Thin Solid Films, 520(1), 400, 2011 |
| No. | Article |
|---|---|
| 1 |
Effect of slurry components on chemical mechanical polishing of copper at low down pressure and a chemical kinetics model Liu XY, Liu YL, Liang Y, Liu HX, Zhao ZW, Gao BH Thin Solid Films, 520(1), 400, 2011 |