검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films Lubguban AA, Lubguban JA, Othman MT, Shende RV, Gangopadhyay S, Miller RD, Volksen W, Kim HC Thin Solid Films, 516(15), 4733, 2008 |
| 2 |
Investigation on hexamethyldisilazane vapor treatment of plasma-damaged nanoporous organosilicate films Rajagopalan T, Lahlouh B, Lubguban JA, Biswas N, Gangopadhyay S, Sun J, Huang DH, Simon SL, Toma D, Butler R Applied Surface Science, 252(18), 6323, 2006 |
| 3 |
Post treatments of plasma-enhanced chemical vapor deposited hydrogenated amorphous silicon carbide for low dielectric constant films Lahlouh B, Rajagopalan T, Biswas N, Sun J, Huang D, Simon SL, Lubguban JA, Gangopadhyay S Thin Solid Films, 497(1-2), 109, 2006 |
| 4 |
Silylation using a supercritical carbon dioxide medium to repair plasma-damaged porous organosilicate films Lahlouh B, Lubguban JA, Sivaraman G, Gale R, Gangopadhyay S Electrochemical and Solid State Letters, 7(12), G338, 2004 |