화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Practical Perspective of Shallow Junction Analysis
Heimbrook LA, Baiocchi FA, Bittner TC, Geva M, Luftman HS, Nakahara S
Journal of Vacuum Science & Technology B, 14(1), 202, 1996
2 Surface Roughness-Induced Artifacts in Secondary-Ion Mass-Spectrometry Depth Profiling and a Simple Technique to Smooth the Surface
Herner SB, Gila BP, Jones KS, Gossmann HJ, Poate JM, Luftman HS
Journal of Vacuum Science & Technology B, 14(6), 3593, 1996
3 Electron-Beam-Induced Current Determination of Shallow Junction Depth
Fitzgerald EA, Gossmann HJ, Unterwald FC, Luftman HS, Monroe D
Journal of Vacuum Science & Technology B, 12(1), 357, 1994
4 Electrical and Structural Characterization of Boron-Doped Si1-xGex Strained Layers
Moriya N, Feldman LC, Luftman HS, King CA
Journal of Vacuum Science & Technology B, 12(1), 383, 1994
5 Interface Analysis of Dry-Etched and Molecular-Beam Epitaxial Regrown AlGaAs
Grober LH, Hong M, Mannaerts JP, Freund RS, Luftman HS, Chu SN
Journal of Vacuum Science & Technology B, 12(2), 1038, 1994
6 Hydrogen Plasma Processing of GaAs and AlGaAs
Choquette KD, Freund RS, Hong M, Luftman HS, Chu SN, Mannaerts JP, Wetzel RC
Journal of Vacuum Science & Technology B, 11(6), 2025, 1993