검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Improvement of the properties and electrical performance on TiCl4-based TiN film using sequential flow chemical vapor deposition process Cheng MD, Luoh T, Su CT, Yang TH, Chen KC, Lu CY Thin Solid Films, 518(8), 2285, 2010 |
| 2 |
Inter-metal inorganic spin-on-glass dielectric layer in 100 nm generation technology Da Cheng M, Luoh T, Su CT, Yang TH, Chen KC, Lu CY Thin Solid Films, 516(23), 8726, 2008 |