검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Finite element modeling and experimental validation of the sealing mechanism of the ConFlat (R) joint Lutkiewicz P, Rathjen C Journal of Vacuum Science & Technology A, 26(3), 537, 2008 |
| No. | Article |
|---|---|
| 1 |
Finite element modeling and experimental validation of the sealing mechanism of the ConFlat (R) joint Lutkiewicz P, Rathjen C Journal of Vacuum Science & Technology A, 26(3), 537, 2008 |