검색결과 : 1건
No. | Article |
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1 |
Single-Step RIE Fabrication Process of Low Loss InP Waveguide Using CH4/H-2 Chemistry Lysevych M, Tan HH, Karouta F, Jagadish C Journal of the Electrochemical Society, 158(3), H281, 2011 |
No. | Article |
---|---|
1 |
Single-Step RIE Fabrication Process of Low Loss InP Waveguide Using CH4/H-2 Chemistry Lysevych M, Tan HH, Karouta F, Jagadish C Journal of the Electrochemical Society, 158(3), H281, 2011 |