검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The etching characteristics of SrBi2Ta2O9 thin film in CF4/Ar plasma using magnetically enhanced inductively coupled plasma Kim DP, Kim CI Thin Solid Films, 385(1-2), 162, 2001 |
| No. | Article |
|---|---|
| 1 |
The etching characteristics of SrBi2Ta2O9 thin film in CF4/Ar plasma using magnetically enhanced inductively coupled plasma Kim DP, Kim CI Thin Solid Films, 385(1-2), 162, 2001 |