화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Measurement of Young's modulus and residual stress of copper film electroplated on silicon wafer
Zhou Y, Yang CS, Chen JA, Ding GF, Ding W, Wang L, Wang MJ, Zhang YM, Zhang TH
Thin Solid Films, 460(1-2), 175, 2004
2 Effects of Processing on Electrical-Properties of YBa2Cu3O7 Films .2. In-Situ Deposition Processes
Sheats JR, Newman N, Taber RC, Merchant P
Journal of Vacuum Science & Technology A, 12(2), 388, 1994