검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature chemical vapor deposition of titanium nitride films from tetrakis(ethylmethylamido)titanium and ammonia Panda S, Kim J, Weiller BH, Economou DJ, Hoffman DM Thin Solid Films, 357(2), 125, 1999 |
| No. | Article |
|---|---|
| 1 |
Low temperature chemical vapor deposition of titanium nitride films from tetrakis(ethylmethylamido)titanium and ammonia Panda S, Kim J, Weiller BH, Economou DJ, Hoffman DM Thin Solid Films, 357(2), 125, 1999 |