검색결과 : 1건
No. | Article |
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1 |
Influence of Nitrogen or Argon Anneals on the Properties of Wafers and Devices Separated by Implantation of Oxygen Cristoloveanu S, Ionescu A, Wetteroth T, Shin H, Munteanu D, Gentil P, Hong S, Wilson SR Journal of the Electrochemical Society, 144(4), 1468, 1997 |