검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication of 100-nm T-Gates for Monolithic Microwave Integrated-Circuits Using X-Ray-Lithography Gupta N, Hector SD, Rhee KW, Smith HI Journal of Vacuum Science & Technology B, 11(6), 2625, 1993 |
| No. | Article |
|---|---|
| 1 |
Fabrication of 100-nm T-Gates for Monolithic Microwave Integrated-Circuits Using X-Ray-Lithography Gupta N, Hector SD, Rhee KW, Smith HI Journal of Vacuum Science & Technology B, 11(6), 2625, 1993 |