검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Design and development of plasma enhanced chemical vapor deposition universal antireflective layer films for deep subquarter micron deep ultraviolet applications Wang Y, MacWilliams K, Karim Z, Fan W, Reilly M, Holden JM Journal of Vacuum Science & Technology B, 18(6), 2757, 2000 |