검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Metal-catalyzed addition polymers for 157 nm resist applications. synthesis and polymerization of partially fluorinated, ester-functionalized tricyclo[4.2.1.0(2,5)]non-7-enes Sanders DP, Connor EF, Grubbs RH, Hung RJ, Osborn BP, Chiba T, MacDonald SA, Willson CG, Conley W Macromolecules, 36(5), 1534, 2003 |
| 2 |
Low stress development of poly(methylmethacrylate) for high aspect ratio structures Rooks MJ, Kratschmer E, Viswanathan R, Katine J, Fontana RE, MacDonald SA Journal of Vacuum Science & Technology B, 20(6), 2937, 2002 |
| 3 |
Metal-catalyzed vinyl addition polymers for 157 nm resist applications. 2. Fluorinated norbornenes: Synthesis, polymerization, and initial imaging results Tran HV, Hung RJ, Chiba T, Yamada S, Mrozek T, Hsieh YT, Chambers CR, Osborn BP, Trinque BC, Pinnow MJ, MacDonald SA, Willson CG, Sanders DP, Connor EF, Grubbs RH, Conley W Macromolecules, 35(17), 6539, 2002 |
| 4 |
Anisotropic Etching of a Novalak-Based Polymer at Cryogenic Temperature Hsiao R, Yu K, Fan LS, Pandhumsopom T, Sanitini H, Macdonald SA, Robertson N Journal of the Electrochemical Society, 144(3), 1008, 1997 |