화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 The effects of hydrogen annealing on gate oxide integrity of U-shaped trench MOSFET with 400 A gate oxide
Wu CT, Sharp J, Madson G, Michalowicz J
Journal of the Electrochemical Society, 153(10), G916, 2006
2 The effect of carrier gas in gate oxidation on the gate oxide integrity of thick gate oxide for UMOSFETs
Wu CT, Woolsey DS, Madson G, Michalowicz J
Journal of the Electrochemical Society, 152(9), F142, 2005