검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Influence of sputtering conditions on microstructure and mechanical properties of Zr-Si-N films prepared by radio-frequency-reactive sputtering Zhou M, Nose M, Deguchi Y, Mae T, Nogi K Journal of Vacuum Science & Technology A, 21(5), 1791, 2003 |
| 2 |
Microstructure and mechanical properties of Zr-Si-N films prepared by rf-reactive sputtering Nose M, Chiou WA, Zhou M, Mae T, Meshii M Journal of Vacuum Science & Technology A, 20(3), 823, 2002 |