검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Exploration of etch step interactions in the dual patterning process for process modeling Melvin LS, Ward BS, Song H, Rhie SU, Lucas KD, Wiaux V, Verhaegen S, Maenhoudt M Journal of Vacuum Science & Technology B, 26(6), 2434, 2008 |
| 2 |
Process optimization and integration of trimethylsilane-deposited alpha-SiC : H and alpha-SiCO : H dielectric thin films for damascene processing Gray WD, Loboda MJ, Bremmer JN, Struyf H, Lepage M, Van Hove M, Donaton RA, Sleeckx E, Stucchi M, Lanckmans F, Gao T, Boullart W, Coenegrachts B, Maenhoudt M, Vanhaelemeersch S, Meynen H, Maex K Journal of the Electrochemical Society, 150(7), G404, 2003 |