검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication of 100 nm pitch copper interconnects by electron beam lithography Wu W, Jonckheere R, Tokei Z, Brongersma SH, Van Hove M, Maez K Journal of Vacuum Science & Technology B, 22(4), L11, 2004 |
| No. | Article |
|---|---|
| 1 |
Fabrication of 100 nm pitch copper interconnects by electron beam lithography Wu W, Jonckheere R, Tokei Z, Brongersma SH, Van Hove M, Maez K Journal of Vacuum Science & Technology B, 22(4), L11, 2004 |