검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulating the effects of pattern density gradients on electron-beam projection lithography pattern transfer distortions Reu PL, Engelstad RL, Lovell EG, Magg CK, Lercel MJ, Mackay RS Journal of Vacuum Science & Technology B, 19(6), 2652, 2001 |