검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Self-consistent simulation study on magnetized inductively coupled plasma for 450 mm semiconductor wafer processing Lee HJ, Kim YG Thin Solid Films, 521, 78, 2012 |
| 2 |
Etch characteristics of SrBi2Ta2O9 (SBT) thin films using magnetized inductively coupled plasmas Lee YJ, Jeong CH, Bae JW, You IK, Park JW, Yeom GY Thin Solid Films, 398-399, 652, 2001 |