검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effect of slurry ionic salts at dielectric silica CMP Choi W, Mahajan U, Lee SM, Abiade J, Singh RK Journal of the Electrochemical Society, 151(3), G185, 2004 |
| 2 |
Effect of particle size of chemical mechanical polishing slurries for enhanced polishing with minimal defects Basim GB, Adler JJ, Mahajan U, Singh RK, Moudgil BM Journal of the Electrochemical Society, 147(9), 3523, 2000 |
| 3 |
Surface interaction forces in chemical-mechanical planarization Rajan K, Singh R, Adler J, Mahajan U, Rabinovich Y, Moudgil BM Thin Solid Films, 308-309, 529, 1997 |