검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Residual stress in TiN film deposited by arc ion plating Matsue T, Hanabusa T, Miki Y, Kusaka K, Maitani E Thin Solid Films, 343-344, 257, 1999 |
| No. | Article |
|---|---|
| 1 |
Residual stress in TiN film deposited by arc ion plating Matsue T, Hanabusa T, Miki Y, Kusaka K, Maitani E Thin Solid Films, 343-344, 257, 1999 |