검색결과 : 2건
No. | Article |
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1 |
Vapor-Deposition Polymerization of Polyimide for Microelectronic Applications Malba V, Liberman V, Bernhardt AF Journal of Vacuum Science & Technology A, 15(3), 844, 1997 |
2 |
Vapor-Deposition of Polyimide - Segregation of Partially Reacted Species at the Polyimide Si(100) Interface Liberman V, Malba V, Bernhart AF Thin Solid Films, 305(1-2), 26, 1997 |