검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Electromigration cu mass flow in cu interconnections Hu CK, Canaperi D, Chen ST, Gignac LM, Kaldor S, Krishnan M, Malhotra SG, Liniger E, Lloyd JR, Rath DL, Restaino D, Rosenberg R, Rubino J, Seo SC, Simon A, Smith S, Tseng WT Thin Solid Films, 504(1-2), 274, 2006 |
| 2 |
Strain Gradients and Normal Stresses in Textured Mo Thin-Films Malhotra SG, Rek ZU, Yalisove SM, Bilello JC Journal of Vacuum Science & Technology A, 15(2), 345, 1997 |
| 3 |
Analysis of Thin-Film Stress Measurement Techniques Malhotra SG, Rek ZU, Yalisove SM, Bilello JC Thin Solid Films, 301(1-2), 45, 1997 |
| 4 |
Depth-Sensitive Strain Analysis of a W-Ta-W Trilayer Malhotra SG, Rek Z, Yalisove SM, Bilello JC Thin Solid Films, 301(1-2), 55, 1997 |