검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies Petrovic ZL, Raspopovic ZM, Stojanovic VD, Jovanovic JV, Malovic G, Makabe T, de Urquijo J Applied Surface Science, 253(16), 6619, 2007 |
| 2 |
Data bases for modeling plasma devices for processing of integrated circuits Nikitovic Z, Sasic O, Petrovic ZL, Malovic G, Strinic A, Dujko S, Raspopovic Z, Radmilovic-Radjenovic M Materials Science Forum, 453-454, 15, 2004 |