검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Etching of high-k dielectric Zr1-xAlxOy films in chlorine-containing plasmas Pelhos K, Donnelly VM, Kornblit A, Green ML, Van Dover RB, Manchanda L, Hu Y, Morris M, Bower E Journal of Vacuum Science & Technology A, 19(4), 1361, 2001 |
| 2 |
Crystallization kinetics in amorphous (Zr0.62Al0.38)O-1.8 thin films van Dover RB, Lang DV, Green ML, Manchanda L Journal of Vacuum Science & Technology A, 19(6), 2779, 2001 |