검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Basic constraints for a multibeam lithography column Mankos M, Coyle S, Fernandez A, Sagle A, Owens W, Sullivan J, Chang THP Journal of Vacuum Science & Technology B, 19(2), 467, 2001 |
| 2 |
Electron-electron interactions in multibeam lithography columns Mankos M, Sagle A, Coyle ST, Fernandez A Journal of Vacuum Science & Technology B, 19(6), 2566, 2001 |
| 3 |
Progress toward a high-brightness photoemission source for multiple-electron beam lithography Coyle ST, Fernandez A, Janaway G, Sagle A, Mankos M Journal of Vacuum Science & Technology B, 19(6), 2581, 2001 |
| 4 |
Multisource optimization of a column for electron lithography Mankos M, Coyle S, Fernandez A, Sagle A, Allen P, Owens W, Sullivan J, Chang THP Journal of Vacuum Science & Technology B, 18(6), 3010, 2000 |
| 5 |
Demonstration of multiblanker electron-beam technology Winograd G, Krishnamurthi V, Garcia R, Veneklasen LH, Mankos M, Pease F Journal of Vacuum Science & Technology B, 18(6), 3052, 2000 |
| 6 |
Optimization of microcolumn electron optics for high-current applications Mankos M, Lee KY, Muray L, Spallas J, Hsu Y, Stebler C, DeVore W, Bullock E, Chang THP Journal of Vacuum Science & Technology B, 18(6), 3057, 2000 |
| 7 |
Advances in arrayed microcolumn lithography Muray LP, Spallas JP, Stebler C, Lee K, Mankos M, Hsu Y, Gmur M, Chang THP Journal of Vacuum Science & Technology B, 18(6), 3099, 2000 |
| 8 |
Thin-film gated photocathodes for electron-beam lithography Pei Z, McCarthy J, Berglund CN, Chang TPH, Mankos M, Lee KY, Yu ML Journal of Vacuum Science & Technology B, 17(6), 2814, 1999 |
| 9 |
Electron-optical optimization for Gaussian, high-current, high-dose columns Mankos M, Veneklasen LH, Garcia R, Pearce-Percy H Journal of Vacuum Science & Technology B, 16(6), 3206, 1998 |
| 10 |
Atomic Step Distributions on Annealed Periodic Si(001) Gratings Tanaka S, Umbach CC, Blakely JM, Tromp RM, Mankos M Journal of Vacuum Science & Technology A, 15(3), 1345, 1997 |