화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Characterization of RuO2 Thin-Films Deposited on Si by Metal-Organic Chemical-Vapor-Deposition
Liao PC, Mar SY, Ho WS, Huang YS, Tiong KK
Thin Solid Films, 287(1-2), 74, 1996
2 Modeling of the Formation of RuO2 Thin-Film from Ru(C5H5)(2) by Metal-Organic Chemical-Vapor Decomposition
Mar SY, Huang YS, Tiong KK
Thin Solid Films, 258(1-2), 104, 1995
3 Grain-Boundary Scattering in Ruthenium Dioxide Thin-Films
Mar SY, Liang JS, Sun CY, Huang YS
Thin Solid Films, 238(1), 158, 1994