검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Conductance-atomic force microscope characterization of focused ion beam chip repair processes Marchman H, McMurray J, Wildman H Journal of Vacuum Science & Technology B, 20(6), 2690, 2002 |
| 2 |
Integration of unit processes in a shallow trench isolation module for a 0.25 mu m complementary metal-oxide semiconductor technology Chatterjee A, Ali I, Joyner K, Mercer D, Kuehne J, Mason M, Esquivel A, Rogers D, O'Brien S, Mei P, Murtaza S, Kwok SP, Taylor K, Nag S, Hames G, Hanratty M, Marchman H, Ashburn S, Chen IC Journal of Vacuum Science & Technology B, 15(6), 1936, 1997 |
| 3 |
Scanning electron microscope matching and calibration for critical dimensional metrology Marchman H Journal of Vacuum Science & Technology B, 15(6), 2155, 1997 |