검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Near-surface secondary-ion-mass-spectrometry analyses of plasma-based B ion implants in Si Buyuklimanli TH, Magee CW, Marino JW, Walther SR Journal of Vacuum Science & Technology B, 24(1), 408, 2006 |
| 2 |
Improved near surface characterization of shallow arsenic distribution by SIMS depth profiling Buyuklimanli TH, Marino JW, Novak SW Applied Surface Science, 231-2, 636, 2004 |
| 3 |
Approaching the limit for quantitative SIMS measurement of ultra-thin nitrided SiO2 films Novak SW, Bekos EJ, Marino JW Applied Surface Science, 175, 678, 2001 |