검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Nanostructuring of Mo/Si multilayers by means of reactive ion etching using a three-level mask Dreeskornfeld L, Haindl G, Kleineberg U, Heinzmann U, Shi F, Volland B, Rangelow IW, Majkova E, Luby S, Kostic, Matay L, Hrkut P, Hudek P, Lee HY Thin Solid Films, 458(1-2), 227, 2004 |