검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Use of Multifunctional Carboxylic Acids and Hydrogen Peroxide To Improve Surface Quality and Minimize Phosphine Evolution During Chemical Mechanical Polishing of Indium Phosphide Surfaces Matovu JB, Ong P, Leunissen LHA, Krishnan S, Babu SV Industrial & Engineering Chemistry Research, 52(31), 10664, 2013 |
| 2 |
Chemical Mechanical Polishing of Ge in Hydrogen Peroxide-Based Silica Slurries: Role of Ionic Strength Matovu JB, Penta NK, Peddeti S, Babu SV Journal of the Electrochemical Society, 158(11), H1152, 2011 |