검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Molecular dynamics simulation of microcrystalline Si deposition processes by silane plasmas Matsukuma M, Hamaguchi S Thin Solid Films, 516(11), 3443, 2008 |
| 2 |
Time evolution of electrode voltage distribution in large-area capacitively coupled plasmas Matsukuma M, Hamaguchi S Thin Solid Films, 515(12), 5188, 2007 |