검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Surface reaction of silicon chlorides during atomic layer deposition of silicon nitride Yusup LL, Park JM, Mayangsari TR, Kwon YK, Lee WJ Applied Surface Science, 432, 127, 2018 |
| 2 |
Catalyzed Atomic Layer Deposition of Silicon Oxide at Ultralow Temperature Using Alkylamine Mayangsari TR, Park JM, Yusup LL, Gu J, Yoo JH, Kim HD, Lee WJ Langmuir, 34(23), 6660, 2018 |
| 3 |
Study of surface reaction during selective epitaxy growth of silicon by thermodynamic analysis and density functional theory calculation Mayangsari TR, Yusup LL, Park JM, Blanquet E, Pons M, Jung J, Lee WJ Journal of Crystal Growth, 468, 278, 2017 |