검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Characterization of ultrashallow dopant profiles using spreading resistance profiling Tan LS, Tan LCP, Leong MS, Mazur RG, Ye CW Journal of Vacuum Science & Technology B, 20(1), 483, 2002 |
| 2 |
Product wafer monitoring of ultrashallow channel implants with an elastic metal gate Hillard RJ, Howland WH, Mazur RG, Ye W, Variam NK Journal of Vacuum Science & Technology B, 20(1), 488, 2002 |
| 3 |
High-resolution damage depth profiles of unannealed sub-100 nm B+ implants in (100) silicon Hartford CL, Hillard RJ, Mazur RG, Foad MA Journal of Vacuum Science & Technology B, 16(1), 316, 1998 |
| 4 |
Profiling of Silicide Silicon Structures Using a Combination of the Spreading Resistance and Point-Contact Current-Voltage Methods Heddleson JM, Weinzierl SR, Hillard RJ, Raichoudhury P, Mazur RG Journal of Vacuum Science & Technology B, 12(1), 317, 1994 |
| 5 |
Detection of Anomalous Defect-Enhanced Diffusion Using Advanced Spreading Resistance Measurements and Analysis Weinzierl SR, Hillard RJ, Heddleson JM, Raichoudhury P, Mazur RG, Osburn CM Journal of Vacuum Science & Technology B, 12(1), 322, 1994 |
| 6 |
Accurate Profiling of Ultra-Shallow Implants with Mercury Gate Metal-Oxide-Semiconductor Capacitance-Voltage Ledudal R, Hillard RJ, Heddleson JM, Weinzierl SR, Raichoudhury P, Mazur RG Journal of Vacuum Science & Technology B, 12(1), 336, 1994 |