검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Phase shift mask interferometric birefringence monitor McIntyre GR, Neureuther A Journal of Vacuum Science & Technology B, 24(6), 2808, 2006 |
| 2 |
Screening layouts for high-numerical aperture and polarization effects using pattern matching McIntyre GR, Holwill J, Neureuther A, Capodieci L, Zou Y, Levinson H, Kye J Journal of Vacuum Science & Technology B, 23(6), 2646, 2005 |