검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low damage sputter deposition of tungsten for decanano compound semiconductor transistors Cao X, Macintyre DS, Thoms S, Li X, Zhou H, Wilkinson CDW, Holland M, Donaldson L, McEwan F, McLellend H, Thayne I Journal of Vacuum Science & Technology B, 23(6), 3138, 2005 |