검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Plasma doping two-dimensional characterization using low energy x-ray emission spectroscopy and full wafer secondary ion mass spectrometry/angle-resolved x-ray electron spectroscopy techniques Qin S, Morinville W, Zhuang K, Fabreguette F, McTeer A, Hu YJ, Lu SF Journal of Vacuum Science & Technology B, 28(1), C1D1, 2010 |
| 2 |
Comparative study of native oxide impacts on low energy doping processes Qin S, McTeer A, Zhuang K, Morinville W, Lu SF Journal of Vacuum Science & Technology B, 28(1), C1C77, 2010 |
| 3 |
Damage engineering of boron-based low energy ion implantations on ultrashallow junction fabrications Qin S, Hu YJ, McTeer A Journal of Vacuum Science & Technology B, 28(3), 588, 2010 |
| 4 |
Co-gas impact of B2H6 plasma diluted with helium on the plasma doping process in a pulsed glow-discharge system Qin S, McTeer A, Hu YJ Journal of Vacuum Science & Technology B, 23(6), 2272, 2005 |