| 1 |
Integrated measurement of Ti and TiN thickness and optical constants using reflectance data through a vacuum chamber window
Tabet MF, Kelkar U, McGahan WA
Journal of Vacuum Science & Technology A, 18(4), 1704, 2000 |
| 2 |
Use of artificial neural networks to predict thickness and optical constants of thin films from reflectance data
Tabet MF, McGahan WA
Thin Solid Films, 370(1-2), 122, 2000 |
| 3 |
Thickness and index measurement of transparent thin films using neural network processed reflectance data
Tabet MF, McGahan WA
Journal of Vacuum Science & Technology A, 17(4), 1836, 1999 |
| 4 |
A multi-sample, multi-wavelength, multi-angle investigation of the interface layer between silicon and thermally grown silicon dioxide
Herzinger CM, Johs B, McGahan WA, Paulson W
Thin Solid Films, 313-314, 281, 1998 |
| 5 |
Optical-Properties of Cobalt Oxide-Films Deposited by Spray-Pyrolysis
Athey PR, Urban FK, Tabet MF, Mcgahan WA
Journal of Vacuum Science & Technology A, 14(3), 685, 1996 |
| 6 |
Oxygen Plasma Asher Contamination - An Analysis of Sources and Remedies
Synowicki RA, Hale JS, Mcgahan WA, Ianno NJ, Woollam JA
Journal of Vacuum Science & Technology A, 14(6), 3075, 1996 |
| 7 |
Spectroscopic Ellipsometry Studies of Indium Tin Oxide and Other Flat-Panel Display Multilayer Materials
Woollam JA, Mcgahan WA, Johs B
Thin Solid Films, 241(1-2), 44, 1994 |
| 8 |
Optical Analysis of Complex Multilayer Structures Using Multiple Data-Types
Johs BD, Mcgahan WA, Woollam JA
Thin Solid Films, 253(1-2), 25, 1994 |
| 9 |
Modified Forouhi and Bloomer Dispersion Model for the Optical-Constants of Amorphous Hydrogenated Carbon Thin-Films
Mcgahan WA, Makovicka T, Hale J, Woollam JA
Thin Solid Films, 253(1-2), 57, 1994 |
