검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
At-wavelength interferometry for extreme ultraviolet lithography Tejnil E, Goldberg KA, Lee SH, Medecki H, Batson PJ, Denham PE, MacDowell AA, Bokor J, Attwood D Journal of Vacuum Science & Technology B, 15(6), 2455, 1997 |
| 2 |
Progress Towards Lambda/20 Extreme-Ultraviolet Interferometry Goldberg KA, Beguiristain R, Bokor J, Medecki H, Attwood DT, Jackson K, Tejnil E, Sommargren GE Journal of Vacuum Science & Technology B, 13(6), 2923, 1995 |