검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Effect of plasma flux, composition on the nitriding rate of stainless steel Muratore C, Walton SG, Leonhardt D, Fernsler RF, Blackwell DD, Meger RA Journal of Vacuum Science & Technology A, 22(4), 1530, 2004 |
| 2 |
Etching with electron beam generated plasmas Leonhardt D, Walton SG, Muratore C, Fernsler RF, Meger RA Journal of Vacuum Science & Technology A, 22(6), 2276, 2004 |
| 3 |
Ion energy distributions in a pulsed, electron beam-generated plasma Walton SG, Leonhardt D, Blackwell DD, Fernsler RF, Murphy DP, Meger RA Journal of Vacuum Science & Technology A, 19(4), 1325, 2001 |
| 4 |
Probe diagnostic development for electron beam produced plasmas Blackwell DD, Walton SG, Leonhardt D, Murphy DP, Fernsler RF, Amatucci WE, Meger RA Journal of Vacuum Science & Technology A, 19(4), 1330, 2001 |
| 5 |
Plasma diagnostics in large area plasma processing system Leonhardt D, Walton SG, Blackwell DD, Amatucci WE, Murphy DP, Fernsler RF, Meger RA Journal of Vacuum Science & Technology A, 19(4), 1367, 2001 |