검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Metal-induced crystallization of polycrystalline silicon by in-situ excimer laser annealing during low-pressure CVD growth Loreti S, Santoni A, Frycek R, Menicucci I, Minarini C, Della Sala D Materials Science Forum, 453-454, 43, 2004 |
| 2 |
In situ excimer laser annealing of low-temperature low-pressure chemical vapour deposition grown polycrystalline silicon: influence of metal diffusion on the film morphology and on the growth rate Loreti S, Santoni A, Lancok J, Menicucci I, Minarini C, Della Sala D Thin Solid Films, 458(1-2), 1, 2004 |
| 3 |
Low-temperature laser-CVD thin film growth of SiC from Si2H6 and C2H2 Santoni A, Lancok J, Loreti S, Menicucci I, Minarini C, Fabbri F, Della Sala D Journal of Crystal Growth, 258(3-4), 272, 2003 |
| 4 |
Laser-assisted chemical vapor deposition of thick poly-Si layers for solar cells Della Sala D, Loreti S, Fornarini L, Menicucci I, Santoni A, Delli Veneri P, Minarini C, Privato C, Lancock J Thin Solid Films, 403-404, 302, 2002 |