검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Effect of the composition on the bandgap width of high-kappa MexTiyOz (Me = Hf, Ta, Sr) layers Wang WC, Badylevich M, Afanas'ev VV, Stesmans A, Popovici M, Tomida K, Menou N, Kittl JA, Lukosius M, Kaynak CB, Wenger C Thin Solid Films, 519(17), 5730, 2011 |
| 2 |
Atomic Layer Deposition of Strontium Titanate Films Using Sr((Bu3Cp)-Bu-t)(2) and Ti(OMe)(4) Popovici M, Van Elshocht S, Menou N, Swerts J, Pierreux D, Delabie A, Brijs B, Conard T, Opsomer K, Maes JW, Wouters DJ, Kittl JA Journal of the Electrochemical Society, 157(1), G1, 2010 |
| 3 |
Growth and Material Characterization of Hafnium Titanates Deposited by Atomic Layer Deposition Popovici M, Delabie A, Van Elshocht S, Clima S, Pourtois G, Nyns L, Tomida K, Menou N, Opsomer K, Swerts J, Detavernier C, Wouters D, Kittl JA Journal of the Electrochemical Society, 156(10), G145, 2009 |
| 4 |
Alternative high-k dielectrics for semiconductor applications Van Elshocht S, Adelmann C, Clima S, Pourtois G, Conard T, Delabie A, Franquet A, Lehnen P, Meersschaut J, Menou N, Popovici M, Richard O, Schram T, Wang XP, Hardy A, Dewulf D, Van Bael MK, Lehnen P, Blomberg T, Pierreux D, Swerts J, Maes JW, Wouters DJ, De Gendt S, Kittl JA Journal of Vacuum Science & Technology B, 27(1), 209, 2009 |