검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electrochemical investigation of surface reactions for chemically promoted chemical mechanical polishing of TaN in tartaric acid solutions Janjam SVSB, Peethala BC, Zheng JP, Babu SV, Roy D Materials Chemistry and Physics, 123(2-3), 521, 2010 |