검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The power source effect on SiOx coating deposition by plasma enhanced chemical vapor deposition Zhang JF, Chen Q, Zhang YF, Liu FP, Liu ZW Thin Solid Films, 517(14), 3850, 2009 |
| No. | Article |
|---|---|
| 1 |
The power source effect on SiOx coating deposition by plasma enhanced chemical vapor deposition Zhang JF, Chen Q, Zhang YF, Liu FP, Liu ZW Thin Solid Films, 517(14), 3850, 2009 |